Fabrication of microneedles by MEMS technologies
نویسندگان
چکیده
منابع مشابه
CMOS MEMS Fabrication Technologies and Devices
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...
متن کاملFabrication of conical microneedles array using photolithography
Background and Aim: Microneedle technology has led to huge changes in the field of drug delivery medicine. Using microneedles, the drug can be injected locally, painlessly, and in very low and controlled doses with high precision. Local drug delivery through the skin with microneedles has many advantages over other methods of drug delivery. In this method, the drug does not enter the gastrointe...
متن کاملDemonstration of a Micro-cpl Based on Mems Fabrication Technologies
Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...
متن کاملA scalable fabrication process of polymer microneedles
While polymer microneedles may easily be fabricated by casting a solution in a mold, either centrifugation or vacuumizing is needed to pull the viscous polymer solution into the microholes of the mold. We report a novel process to fabricate polymer microneedles with a one-sided vacuum using a ceramic mold that is breathable but water impermeable. A polymer solution containing polyvinyl alcohol ...
متن کاملMEMS Fabrication
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures. Process flows include wet bulk etching and wafer bonding, surface micromachining, deep trench silicon micromachining, CMOS MEMS, and micromolding.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Drug Delivery System
سال: 2012
ISSN: 0913-5006,1881-2732
DOI: 10.2745/dds.27.176